Apparatus for inspecting defects
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United States of America Patent
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May 11, 2010
Issued Date -
N/A
app pub date -
Nov 7, 2007
filing date -
Nov 7, 2006
priority date (Note) -
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Abstract
This invention is a defect inspection apparatus having a reflecting objective lens free from chromatic aberration, or an achromatic catadioptric lens, and a dioptric objective lens, and thus constructed to suppress changes in brightness due to multi-wavelength illumination (i.e., illumination with the irradiation light having a plurality of wavelength bands), to provide a clearer view of defects present on a sample, by means of selective wavelength detection in order to improve sensitivity, and to allow one spatial image on the sample to be acquired as different kinds of optical images.
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