Inspection apparatus
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United States of America Patent
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-
Jul 10, 2007
Grant Date -
Feb 2, 2006
app pub date -
Jul 14, 2005
filing date -
Jul 15, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An inspection apparatus inspects an inspected object based on a waveform quality of a signal that the inspected object outputs. The inspection apparatus has a power supply section which outputs a control signal that controls an output of the inspected object, a waveform measuring section which measures the signal that the inspected object outputs to generate a waveform image, an analyzing section which derives a value indicating a waveform quality from the waveform image that the waveform measuring section measures, a deciding section which decides whether or not the value derived by the analyzing section satisfies a target value, and an optimizing section which changes a set value of the control signal that the power supply section outputs, based on a decision result of the deciding section.
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