Method for cleaning a synthetic surface

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United States of America Patent

PATENT NO 11872603
SERIAL NO

16304836

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Abstract

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The invention relates to a method for cleaning a synthetic surface, in particular to remove metal dirt and/or particles therefrom, said method being characterized by the following steps: a) the synthetic surface is rinsed with deionized water; b) the synthetic surface is rinsed with electrolyzed water; and c) the synthetic surface is rinsed with deionized water.

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Patent Owner(s)

Patent OwnerAddress
BROOKS AUTOMATION US LLC15 ELIZABETH DRIVE CHELMSFORD MA 01824

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fryda, Matthias Itzehoe, DE 15 285
Matthée, Thorsten Hohenaspe, DE 5 3
Rebstock, Lutz Gaienhofen, DE 79 461

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