Thermal conductivity gauge

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United States of America Patent

PATENT NO 11946823
APP PUB NO 20230366763A1
SERIAL NO

18303222

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brucker, Gerardo A Longmont, US 33 195
Swinney, Timothy C Fort Collins, US 17 55

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