Aluminum oxide, method for manufacturing aluminum oxide and optical component

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United States of America Patent

PATENT NO 11591713
APP PUB NO 20190024258A1
SERIAL NO

16144619

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Abstract

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Aluminum oxide provides, at a thickness of 5 mm, an internal transmittance of 90% or higher for light at a wavelength of 193 nm.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mizuguchi, Masafumi Yokohama, JP 13 8

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