Substrate support and plasma processing apparatus

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United States of America Patent

PATENT NO 11935729
APP PUB NO 20210305025A1
SERIAL NO

17190178

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The disclosed substrate support includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate placed thereon. The second region is provided to surround the first region and configured to hold an edge ring placed thereon. The first electrode is provided in the first region to receive a first electrical bias. The second electrode is provided in at least the second region to receive a second electrical bias. The second electrode extends below the first electrode to face the first electrode within the first region.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koizumi, Katsuyuki Miyagi, JP 34 209
Sasaki, Yasuharu Miyagi, JP 98 1839
Sugawara, Tsuguto Miyagi, JP 6 2
Tamura, Hajime Miyagi, JP 54 738
Yamaguchi, Shin Miyagi, JP 49 384

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