Water treatment device and water treatment method using the same
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United States of America Patent
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-
Jan 2, 2007
Grant Date -
Dec 9, 2004
app pub date -
Mar 24, 2004
filing date -
Mar 26, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Object of the preferred embodiment is to remove sol-form microparticles and nitrogen components contained in CMP wastewater. Sol-form microparticle components contained in CMP wastewater are removed by a filtration treatment using a filter device 13, having a gel-form second filter. Also, nitrogen components in the CMP wastewater are removed by an electrochemical treatment using electrode 12. The filtration treatment and the electrochemical treatment can be carried out in individual tanks or can be carried out in the same tank. By performing the filtration treatment and the electrochemical treatment in the same tank, a space-saving water treatment device can be provided.
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