Member for semiconductor manufacturing device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11295934
APP PUB NO 20190027343A1
SERIAL NO

16127923

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, a member for a semiconductor manufacturing device includes an alumite base material including a concavity, and a first layer formed on the alumite base material and including an yttrium compound. The first layer includes a first region, and a second region provided in the concavity and located between the first region and the alumite base material. An average particle diameter in the first region is shorter than an average particle diameter in the second region.

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Patent Owner(s)

  • TOTO LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nitta, Yasutaka Kitakyushu, JP 7 10

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