Importance

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Abstract

A sensor device includes a base body 12 having a vibrating portion 14, a piezoelectric element 20 fixed onto one surface of the vibrating portion 14 and having a piezoelectric film 22 and a pair of electrodes 24a, 24b which are in contact with the piezoelectric film 22, a space 16 that allows a fluid to lead to the other surface of the vibrating portion 14, and introduction holes 18 that communicate with the space 16, and the sensor device 10 is in a longitudinal shape. A recess 15 which contains at least an opening end of the introduction hole 18 on the surface side of the sensor device 10 in its region and extends up to the rear end portion 10' of the sensor device is formed on the surface of the sensor device 10 by a protrusion 13 disposed on the surface of said sensor device so as to extend substantially continuously from the periphery of the introduction holes 18 to the rear end portion 10' of said sensor device.

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First Claim