Electron source manufacturing apparatus and electron source manufacturing method
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United States of America Patent
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Jun 5, 2007
Grant Date -
Apr 7, 2005
app pub date -
Oct 5, 2004
filing date -
Oct 7, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In an electron source manufacturing apparatus, the quantity of heat generated from an electron source substrate is measured. A temperature of a support member for the electron source substrate is controlled based on the measured quantity of heat generated. A variation in performances of electron source substrates is suppressed, which increase their life.
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