Polishing cloth for chemical mechanical polishing, and chemical mechanical polishing apparatus using said cloth
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 3, 2007
Grant Date -
N/A
app pub date -
Dec 2, 1999
filing date -
Dec 2, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A chemical mechanical polishing cloth for chemically mechanically polishing a workpiece. This chemical mechanical polishing cloth includes, on the opposite-to-workpiece face thereof: polishing projections having polishing faces arranged to come in contact with a workpiece for polishing the same; polishing agent passages for introducing a polishing agent; and at least one-stage step portions formed between the polishing faces of the polishing projections and the bottoms of the polishing agent passages.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully