X-ray diffractometer method for determining thickness of multiple non-metallic crystalline layers and fourier transform method
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United States of America Patent
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May 1, 2001
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N/A
app pub date -
Dec 15, 1998
filing date -
Dec 15, 1998
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Expired
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Abstract
An x-ray diffractometry technique finds thickness of multiple layers of non-metallic crystalline material. A rocking curve is windowed to eliminate a main peak. The windowed curve is smoothed. The smoothed curve is subtracted from the windowed curve to yield a difference curve. The difference curve is transformed to make its average value zero and to constrain its endpoints to zero. A Fast Fourier transform is applied to the transformed difference curve. A thickness transform is applied to the result to yield a layer thickness.
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