Fast measurement method for micro-nano deep groove structure based on white light interference

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United States of America Patent

PATENT NO 11733034
APP PUB NO 20230118227A1
SERIAL NO

18082552

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A fast measurement method for micro-nano deep groove structure based on white light interference, including: establishing a white light interference system, using the white light interference system to measure the structure of the groove, the CCD camera collects and obtains multiple groups of groove interferograms and the serial number corresponding to each groove interferogram in each group; processing each group of groove interferograms of the groove sample to obtain the maximum contrast of each group of groove interferograms and the 3D reconstruction diagram of the local structure; extracting the interface reconstruction diagram in the 3D reconstruction diagram of the local structure according to each group of the groove interferograms; after splicing the interface reconstruction diagrams corresponding to all groups of groove interferograms, obtaining a 3D structural reconstruction diagram of the groove sample, and measuring the depth and width of the groove sample according to the 3D structural reconstruction diagram.

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Patent Owner(s)

  • ZHEJIANG UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Guozhong Zhejiang, CN 5 0
Liang, Yiyong Zhejiang, CN 1 0
Zhang, Kexin Zhejiang, CN 4 2

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