Importance

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Abstract

Multi-functional sensor comprises a support base made from borosilicate, a diaphragm with a E-shaped section secured to the base, the diaphragm being made from single crystalline silicon, principal plane thereof being oriented to be a crystalline plane (110), a differential pressure sensor having p-doped piezoresistor elements formed in the principal plane of the diaphragm at a thin wall portion of the E-shaped sectional diaphragm, each element being arranged along a crystal axis <111>, a static pressure sensor having p-doped piezoresistor elements formed in the principal plane at an outer peripheral thick wall portion of the E-shaped sectional diaphragm, each element being arranged along the crystal axis <111>, and a temperature sensor having a p-doped piezoresistor element formed in the principal plane at the outer peripheral thick wall portion of the E-shaped sectional diaphragm, the element being arranged along the crystal axis <100>. In the multi-functional sensor thus constructed, deviation of the output signal from the differential pressure sensor due to the influence of the temperature and static pressure can be removed easily to obtain the correct signal.

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First Claim