Alternating hardmasks for tight-pitch line formation

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United States of America Patent

PATENT NO 11610780
APP PUB NO 20210335619A1
SERIAL NO

17340915

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Abstract

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A method for forming fins includes forming a three-color hardmask fin pattern on a fin base layer. The three-color hardmask fin pattern includes hardmask fins of three mutually selectively etchable compositions. Some of the fins of the first color are etched away with a selective etch that does not remove fins of a second color or a third color and that leaves at least one fin of the first color behind. The fins of the second color are etched away. Fins are etched into the fin base layer by anisotropically etching around remaining fins of the first color and fins of the third color.

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Patent Owner(s)

Patent OwnerAddress
TESSERA LLC3025 ORCHARD PARKWAY SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burns, Sean D Hopewell Junction, US 72 722
Felix, Nelson M Briarcliff Manor, US 31 76
Liu, Chi-Chun Altamont, US 108 568
Mignot, Yann A M Slingerlands, US 32 59
Sieg, Stuart A Albany, US 62 220

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