Combined fluid pressure and temperature sensor apparatus
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United States of America Patent
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Jul 27, 2010
Grant Date -
Jul 16, 2009
app pub date -
Dec 11, 2008
filing date -
Jan 10, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A combined fluid pressure transducer and temperature sensor (10) has a housing (12) containing a variable capacitor (14) having a rigid substrate (14a) and attached flexible diaphragm (14b) in sealed, spaced apart relation. The capacitor is mounted in the housing so that the outer face surface of the diaphragm is exposed to a fluid pressure chamber (12k). A temperature responsive sensor element (28) is disposed on the outer face surface of the diaphragm and covered by a thin protective layer. A fluid flow diffuser (30) is disposed in the fluid pressure port (12b) for directing fluid flow across the temperature sensor.
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