Method of manufacturing pixel electrode for reflection type display device

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United States of America Patent

PATENT NO 6508686
APP PUB NO 20010029144A1
SERIAL NO

09870868

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Abstract

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A process of a pixel electrode of a direct-sight type of reflection type liquid-crystal display device is simplified. A pixel electrode 120 of a reflection type liquid-crystal display device is formed of an aluminum film which is formed by sputtering. In forming the aluminum film, moisture is intentionally contained in atmosphere, and also a sample is heated. With this process, aluminum grains grow so that irregularities of .mu.m order is formed on the surface of the aluminum film. The aluminum film thus formed allows the incident light to be irregularly reflected so that it is in a visually white muddy state. This is suitable to the pixel electrode for the reflection type liquid-crystal display device.

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Patent Owner(s)

  • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adachi, Hiroki Kanagawa, JP 182 4465

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