Improvements in contrast of a positive polymer resist having a glass transition temperature through control of the molecular weight distribution and prebaked temperature
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United States of America Patent
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Aug 5, 1986
Issued Date -
N/A
app pub date -
Jul 31, 1985
filing date -
Sep 28, 1982
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention is a method to increase the contrast of a positive polymer resist by control of molecular weight distribution and prebake temperature. The contrast of a positive polymer resist is increased by baking a narrow molecular weight fraction resist above the glass transition temperature. More particularly the contrast is increased by the use of low average molecular weight resist of narrow molecular weight distribution.
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