User interface for quantifying wafer non-uniformities and graphically explore significance
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United States of America Patent
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Jul 3, 2007
Grant Date -
Apr 15, 2004
app pub date -
Dec 24, 2002
filing date -
Sep 26, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A graphical user interface for controlling analysis of a wafer map is provided. The user interface provides a graphical selection control for selecting a region of the wafer map for statistical analysis. The user interface is configured to generate statistical data for the selected region to complete the statistical analysis. The statistical data is then displayed for the selected region. Re-generation of the statistical data for display is performed upon detecting a change in the selected region.
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