Forming mesas on an electrostatic chuck

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United States of America Patent

PATENT NO 11699611
APP PUB NO 20220270907A1
SERIAL NO

17183179

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Importance

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Abstract

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A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 Gpa. The body further comprises a sidewall coating disposed over a sidewall of the body. A method for preparing the body comprises polishing the surface of the body and cleaning the polished surface. The method further comprises depositing the mesas by depositing the adhesion layer on the body, the transition layer over the adhesion layer, and the coating layer over the transition layer. Further, the method includes, polishing the mesas.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boyd, Matthew Morgan Hill, US 9 20
Boyd,, Jr Wendell Glenn Morgan Hill, US 20 491
Wu, Stanley San Ramon, US 13 491

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