Semiconductor test apparatus, semiconductor device test method, and semiconductor device manufacturing method
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United States of America Patent
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Jul 5, 2022
Grant Date -
Apr 1, 2021
app pub date -
Apr 9, 2020
filing date -
Sep 30, 2019
priority date (Note) -
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Abstract
A semiconductor test apparatus includes: a power supply; a high-voltage wire connecting high-voltage terminals of a plurality of semiconductor devices which are objects to be tested to a high-voltage side of the power supply; a low-voltage wire connecting low-voltage terminals of the semiconductor devices to a low-voltage side of the power supply; first switches connected in series to the semiconductor devices respectively, each of the first switches having one end connected to the low-voltage side of the power supply via the low-voltage wire and other end connected to the low-voltage terminal; second switches connected to the semiconductor devices respectively, each of the second switches having one end connected to the high-voltage terminal and other end connected to the low-voltage terminal; and a control circuit controlling the first switches and the second switches.
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