Vertical bipolar transistor including an extrinsic base with reduced roughness, and fabrication process

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6723610
APP PUB NO 20020003286A1
SERIAL NO

09930084

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Abstract

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The vertical bipolar transistor includes an SiGe heterojunction base formed by a stack of layers of silicon and silicon-germanium resting on an initial layer of silicon nitride extending over a side insulation region surrounding the upper part of the intrinsic collector. The stack of layers also extends on the surface of the intrinsic collector which lies inside a window formed in the initial layer of silicon nitride.

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Patent Owner(s)

  • COMMISSARIAT A L'ENERGIE ATOMIQUE;STMICROELECTRONICS S.A.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chantre, Alain Seyssins, FR 34 296
Marty, Michel St. Paul de Varces, FR 72 815
Regolini, Jorge Bernin, FR 6 52

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