Piezoelectric device and piezoelectric device manufacturing method
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United States of America Patent
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Jul 2, 2013
Grant Date -
Jul 7, 2011
app pub date -
Dec 20, 2010
filing date -
Jan 5, 2010
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Abstract
A piezoelectric device includes: a first substrate; a second substrate disposed opposed to the first substrate; a third substrate disposed between the first substrate and the second substrate, a part of the third substrate forming a piezoelectric oscillating piece, and another part of the third substrate forming a frame which surrounds the piezoelectric oscillating piece; a first metal film which joins the first substrate and the frame; a second metal film which joins the second substrate and the frame; and a resin portion provided at least at any one of positions between the first substrate and the first metal film, between the frame and the first metal film, between the second substrate and the second metal film, and between the frame and the second metal film.
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