Diamond like carbon films

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United States of America Patent

PATENT NO 7268846
APP PUB NO 20060093803A1
SERIAL NO

11263777

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Abstract

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Alignment films for use within a liquid crystal display (LCD) and methods for their manufacture are disclosed. Embodiments of the invention generally relate to process conditions that are selected to improve certain properties of the alignment films. The alignment films include a deposited layer of amorphous carbon, a hydrogenated amorphous carbon film or a hydrogenated diamond-like carbon (DLC) film.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Soo Young Fremont, CA 257 12158
Hwang, Ying-Siang Taoyuan, TW 3 7

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