Wafer carrier assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11342199
APP PUB NO 20200118842A1
SERIAL NO

16716189

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A wafer carrier assembly includes a wafer carrier and a fluid passage. The wafer carrier comprises a retainer ring confining a wafer accommodation space. The fluid passage is inside the wafer carrier. The fluid passage includes an inlet and at least an outlet to dispense fluid into the wafer accommodation space.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuang, Hsun-Chung Hsinchu, TW 92 376
Wu, Ming-Tung Hsinchu, TW 20 351

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