Chemical supply system with a pair of bellows connected in series for pumping a fluid
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United States of America Patent
Stats
-
Feb 6, 2001
Grant Date -
N/A
app pub date -
Aug 25, 1997
filing date -
Aug 26, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Connected to a flexible tube 13 which is expandable or shrinkable in the radial direction, are a flowpath 17 on the side of supply, which is provided therein with an on-off valve 21 on the side of supply, and a flowpath 19 on the side of discharge, which is provided therein with an on-off valve 22 on the side of discharge. A bellows 14 elastically deformable in the axial direction is disposed at the outside of the flexible tube 13. This bellows 14 has a small bellows portion 24 and a large bellows portion 25. An incompressible medium 43 is enclosed in a pump chamber 42 formed between the flexible tube 13 and the bellows 14. An operating disk portion disposed between the small bellows portion 24 and the large bellows portion 25 is displaced in the axial direction, whereby the inner volume of the bellows 14 is changed, so that the flexible tube 13 is expanded or shrunk in the radial direction to carry out the pumping operation. With this arrangement, a chemical supply system simplified in construction and excellent in reliability can be provided.
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