Semiconductor structure with nanosheets

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United States of America

PATENT NO 11916070
SERIAL NO

17345452

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Abstract

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Disclosed are semiconductor devices including a substrate, a first transistor formed over a first portion of the substrate, wherein the first transistor comprises a first nanosheet stack including N nanosheets and a second transistor over a second portion of the substrate, wherein the second transistor comprises a second nanosheet stack including M nanosheets, wherein N is different from M in which the first and second nanosheet stacks are formed on first and second substrate regions that are vertically offset from one another.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, Te-Hsin Hsinchu, TW 65 123
Fang, Shang-Wei Hsinchu, TW 17 50
Lin, Wei-Cheng Hsinchu, TW 253 965
Sio, Kam-Tou Hsinchu, TW 124 448
Tzeng, Jiann-Tyng Hsinchu, TW 287 766

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