Cleaning and drying method and apparatus
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United States of America Patent
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Aug 5, 2014
Grant Date -
Jan 26, 2012
app pub date -
Jul 18, 2011
filing date -
Jul 22, 2010
priority date (Note) -
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Abstract
A cleaning liquid is pressurized and superheated to a condition, in which temperature of the cleaning liquid is above an atmospheric boiling point. A product to be cleaned is interposed between a pair of liquid holding blocks, so that gaps are respectively formed between side surfaces of the product and the liquid holding blocks. The pressurized and superheated liquid is injected to the product so that layers of condensate of vapor of injected cleaning liquid are formed in the gaps. Contamination on the surface of the product is removed by the cleaning liquid and the surface is dried by latent heat of the condensate of the vapor of the cleaning liquid.
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