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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

• L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Dussarrat, Christian	Wilmington, US	136	6059
Gatineau, Julien	Tsukuba, JP	48	2705

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 05, 2010	US,7807223,B2   US7807223B2	GRANTED PATENT AS SECOND PUBLICATION
May 08, 2008	US,20080107812,A1   US20080107812A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7807223

Precursors having open ligands for ruthenium containing films deposition

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