Lithographic apparatus and illumination uniformity correction system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11656555
APP PUB NO 20220214622A1
SERIAL NO

17605601

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.

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Patent Owner(s)

  • ASML HOLDING N.V; ASML NETHERLANDS B.V.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Apone, Nicholas Stephen Fairfield, US 1 0
Downey, Todd R Monroe, US 8 43
Gang, Tian Best, NL 5 0
Ledbetter, Alexander Harris Fairfield, US 1 0
Lyons, Joseph Harry Wilton, US 6 1
Mankala, Kalyan Kumar Bethel, US 3 3
Nath, Janardan Norwalk, US 5 4
Unluhisarcikli, Ozer Norwalk, US 6 199

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