CVD of conformal coatings over a depression using alkylmetal precursors
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United States of America Patent
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Oct 31, 1995
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N/A
app pub date -
Oct 22, 1993
filing date -
Sep 21, 1985
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Abstract
A CVD method for forming a conformal coating over a depression or a cave in a top surface is disclosed, which comprises the steps of forming at least one depression or a cave in said top surface where at least a portion of the depression or the cave has an inner surface; providing a reactive precursor containing at least an alkyl metal compound; and CVD forming from a gas of said reactive precursor at least one metal-containing layer over said top surface and said depression or cave such that the ratio ds/dt of the thickness (ds) of the layer on the inner surafce of the depression or cave and the thickness (dt) of the layer on the top surface is substantially one.
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