Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
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United States of America Patent
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Aug 24, 2010
Grant Date -
Aug 21, 2008
app pub date -
Feb 14, 2008
filing date -
Feb 15, 2007
priority date (Note) -
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Abstract
A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.
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