Magnetic field sensing device and method for fabricating thereof
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United States of America Patent
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Dec 5, 2006
Issued Date -
N/A
app pub date -
May 15, 2006
filing date -
Feb 10, 2003
priority date (Note) -
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Abstract
Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.
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