Waveform determining device, waveform determining method, droplet ejecting device, droplet ejecting method, film forming method, device manufacturing method, electronic optical device, and electronic device
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United States of America Patent
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Jun 17, 2008
Grant Date -
Sep 30, 2004
app pub date -
Jan 6, 2004
filing date -
Jan 9, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A measurement unit obtains, when a droplet ejected from an ejecting head adheres to an electrode of a crystal oscillator, a viscosity and a mass of the droplet on the basis of a changed value in resonance frequency and of a resonance resistance of crystal oscillator. Measurement unit then supplies to a control unit droplet information ID showing the obtained viscosity and mass. Control unit determines, on the basis of the viscosity and the mass included in droplet information ID, an appropriate drive waveform to be supplied to ejecting head.
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