Piezoelectric device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11844281
APP PUB NO 20210143315A1
SERIAL NO

17153916

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A piezoelectric device includes a base portion and a membrane portion. The membrane portion is indirectly supported by the base portion, and is located on the upper side relative to the base portion. The membrane portion includes a plurality of layers. The membrane portion does not overlap with the base portion, and includes a single crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The membrane portion is provided with a through-groove penetrating in the up-down direction. The through-groove includes a first step portion provided in the thickest layer among the plurality of layers defining the membrane portion. The width of the through-groove is narrower on a lower side than on an upper side with the first step portion as a boundary.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTD10-1 HIGASHIKOTARI 1-CHOME NAGAOKAKYO-SHI KYOTO-FU 617-8555

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ikeuchi, Shinsuke Nagaokakyo, JP 42 112
Kishimoto, Yutaka Nagaokakyo, JP 55 3876

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