Sputtering target apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8551307
APP PUB NO 20110031117A1
SERIAL NO

12779459

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Abstract

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A sputtering target apparatus is provided. The sputtering target apparatus includes a first target assembly including a first target array having a first target, a second target disposed adjacent to the first target, and a first target dividing region disposed between the first and second targets, the first target assembly extending along a first direction, wherein the first target dividing region has a longitudinal cross-section that is oblique with respect to the first direction.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jeong, Chang-Oh Suwon-si, KR 132 5469
Kim, Do-Hyun Seongnam-si, KR 108 5365
Lee, Dong-Hoon Seoul, KR 213 1976

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