Apparatus for manufacturing glass base material and a method for manufacturing glass base material

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United States of America Patent

PATENT NO 6698240
SERIAL NO

09585573

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Abstract

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An apparatus for manufacturing a glass base material which is an parent material of an optical fiber, comprising: a tank which contains a raw material of the glass base material to vaporize the raw material to generate a raw material in gas phase; a temperature control unit which controls a temperature of the raw material; and a pressure control unit which controls the pressure of the raw material in gas phase.

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Patent Owner(s)

  • SHIN-ETSU CHEMICAL CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatayama, Kazuhisa Annaka, JP 14 43
Hirasawa, Hideo Annaka, JP 45 172
Koide, Hiroyuki Annaka, JP 54 187
Ogino, Go Annaka, JP 7 23
Shimada, Tadakatsu Annaka, JP 49 168
Tobisaka, Yuuji Annaka, JP 45 439
Tsumura, Hiroshi Annaka, JP 13 114

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