Importance

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Abstract

In a system and method for automatically transporting and precisely positioning a work piece at a station for processing, a relatively low precision transport mechanism is utilized to transfer a chuck that holds the work piece to and from the processing station. Notwithstanding the use of the low precision transport mechanism, the chuck can be precisely positioned at the processing station by using a quasi-kinematic coupling. More specifically, the chuck is precisely located at the coupling by engaging pre-defined indexing notches at the coupling. The chuck is securely held against the coupling at the processing station by suction. The coupling may be supported on a precision stage, which is configured to further position the chuck with the work piece thereon with high precision for processing at the processing station. In another aspect of the invention, the chuck is configured to securely hold a smooth surface of the work piece by suction. In a further aspect of the invention, the transport mechanism may be configured to transfer the chuck between multiple processing stations. Each processing station has a similar quasi-kinetic coupling. The coupling may be supported on a single precision stage, which further positions the chuck with relatively high precision with respect to the processing apparatus.

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First Claim