Saucer-shaped half-loop MEMS inductor with very low resistance

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United States of America Patent

PATENT NO 7250841
SERIAL NO

11213155

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Abstract

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A micro-electromechanical system (MEMS) inductor is formed in a saucer shape that completely surrounds a magnetic core structure which is formed from a ferromagnetic material. In addition, an array of MEMS inductors can be formed by dividing up the saucer-shaped MEMS inductor into a number of electrically-isolated MEMS inductor wedges.

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Patent Owner(s)

  • NATIONAL SEMICONDUCTOR CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hopper, Peter J San Jose, CA 249 2450
Hwang, Kyuwoon Palo Alto, CA 34 229
Johnson, Peter Sunnyvale, CA 184 2890
Lindorfer, Philipp San Jose, CA 61 855

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