System, method and apparatus for batch vapor deposition of adhesion promoter for manufacturing discrete track media and bit-patterned media, and mono-molecular layer lubricant on magnetic recording media
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United States of America Patent
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Nov 19, 2013
Grant Date -
Jan 28, 2010
app pub date -
Jul 23, 2008
filing date -
Jul 23, 2008
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Abstract
A batch vapor deposition process for applying adhesion promoter during manufacturing of nanoimprinted discrete track media and bit-patterned media, and mono-molecular layer lubricant on magnetic recording media are disclosed. The adhesion promoter is simultaneously coated on both sides of numerous disk substrates, and minimal solution is wasted. In another step, the lubricant is applied at a uniform thickness that is on the order of a single molecular layer. The lubricant is also applied on the entire disk surfaces while processing multiple disks at a time. Batch processing increases throughput, and vapor lubricant reduces costs compared to conventional techniques. Limited air exposure controls bonding and monolayer adsorption guarantees uniformity.
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