Random copolymer for forming neutral layer, laminate for forming pattern including the same, and method for forming pattern using the same

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United States of America Patent

PATENT NO 11396612
APP PUB NO 20210018843A1
SERIAL NO

17034196

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Abstract

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The present invention provides a random copolymer including structural units represented by the following Chemical Formulae 1 to 3

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Patent Owner(s)

  • SK INNOVATION CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ham, Jin Su Daejeon, KR 19 40
Kim, Sun Young Daejeon, KR 128 506
Lee, Kwang Kuk Daejeon, KR 26 60
Lee, Nam Kyu Daejeon, KR 32 247

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