Micromachined transducer integrated with a charge pump
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United States of America Patent
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Oct 11, 2011
Grant Date -
Nov 23, 2006
app pub date -
May 17, 2006
filing date -
May 17, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
An integrated circuit includes a micromachined transducer and a charge pump. More particularly, on one silicon substrate, a control circuit delivers high voltage from the charge pump to operate the transducer. An electronic apparatus, such as a cell phone or automatic test equipment may include such an integrated circuit.
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