Honeycomb optical window deposition shield and method for a plasma processing system
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United States of America Patent
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-
Jul 10, 2007
Grant Date -
Oct 13, 2005
app pub date -
Mar 30, 2004
filing date -
Mar 30, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An optical window deposition shield including a backing plate having a through hole, and a honeycomb structure having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure. Each cell of the honeycomb structure has an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell. A coupling device configured to couple the honeycomb core structure to the backing plate such that the honeycomb structure is aligned with at least a portion of the through hole in the backing plate. The optical window deposition shield shields the optical viewing window of a plasma processing apparatus from contact with the plasma.
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