Work conveying system and traveling path sealing structure in the work conveying system
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United States of America Patent
Stats
-
Dec 21, 2004
Issued Date -
N/A
app pub date -
Oct 2, 2003
filing date -
Sep 3, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a work conveying system including at least a work holder for holding a work and a horizontal mover for moving the work holder horizontally in an upper ceiling space within a clean room, the work being conveyed to each of plural processing apparatuses. The horizontal mover has at least one linear moving mechanism including a duct with an internal guide, a traveling body engaging the guide and traveling through the traveling path defined by the duct, and a slider connected to the traveling body for travel with the traveling body on the exterior of the traveling path. The work holder is attached to the slider. Air cleaners are disposed at suitable intervals in the traveling path to clean the air therein and to discharge the cleaned air to the exterior. The traveling path accommodates a drive source, a drive mechanism, and a power supply.
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