Diagnostic system of substrate transfer hand

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United States of America Patent

PATENT NO 11476138
SERIAL NO

16337856

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Abstract

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A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

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Patent Owner(s)

  • KAWASAKI JUKOGYO KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujimori, Kazuo Akashi, JP 10 13
Goto, Hirohiko Akashi, JP 29 243
Sumitomo, Masahiko Kakogawa, JP 8 9
Tan, Haruhiko Kobe, JP 17 10
Yamashita, Katsuhiro Kakogawa, JP 56 572
Yoshida, Tetsuya Kakogawa, JP 150 712

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