Ambient controlled transfer module and process system

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United States of America Patent

PATENT NO 10361104
APP PUB NO 20180254207A1
SERIAL NO

15660784

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Abstract

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Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. The transfer chamber is coupled to a thermal process chamber and a substrate is transferred between each of the load lock chamber, the transfer chamber, and the thermal process chamber. In other implementations, a process platform having a load lock chamber, a transfer chamber, and a thermal process chamber is disclosed. Methods of measuring oxygen concentration in a load lock chamber via evacuation of a transfer chamber are also described herein.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Assaf, Shay Gilroy, US 12 30
Carlson, Charles Cedar Park, US 36 656
Constant, Andrew Cupertino, US 6 295
Hickerson, Stephen Hollister, US 3 460
Newman, Jacob Palo Alto, US 33 998
Weaver, William Tyler Austin, US 31 600

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