Systems and methods for achieving peak ion energy enhancement with a low angular spread

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United States of America Patent

PATENT NO 11569067
APP PUB NO 20210313149A1
SERIAL NO

17347504

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Systems and methods for increasing peak ion energy with a low angular spread of ions are described. In one of the systems, multiple radio frequency (RF) generators that are coupled to an upper electrode associated with a plasma chamber are operated in two different states, such as two different frequency levels, for pulsing of the RF generators. The pulsing of the RF generators facilitates a transfer of ion energy during one of the states to another one of the states for increasing ion energy during the other state to further increase a rate of processing a substrate.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Paterson, Alex San Jose, US 110 2828
Shoeb, Juline Fremont, US 18 99
Wu, Ying Livermore, US 170 2104

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