Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto
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United States of America Patent
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Mar 22, 2011
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N/A
app pub date -
Mar 29, 2006
filing date -
Mar 29, 2006
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Abstract
A gas delivery system for supplying a process gas from a gas supply to a thermal processing furnace, a thermal processing furnace equipped with the gas delivery system, and methods for delivering process gas to a thermal processing furnace. The gas delivery system comprises a plurality of regulators, such as mass flow controllers, in a process gas manifold coupling a gas supply with a thermal processing furnace. The regulators establish a corresponding plurality of flows of a process gas at a plurality of flow rates communicated by the process gas manifold to the thermal processing furnace. The gas delivery system may be a component of the thermal processing furnace that further includes a liner that surrounds a processing space inside the thermal processing furnace.
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