Lamp array for thermal processing chamber
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United States of America Patent
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Nov 5, 2002
Grant Date -
N/A
app pub date -
Sep 12, 2000
filing date -
Sep 12, 2000
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A lamp array for a thermal processing chamber. The lamp array includes a plurality of lamps arranged in a generally circular array. The plurality of lamps can be arranged in one or more concentric rings to form a generally circular array. Additional lamp arrays can be provided adjacent the circumference of the circular array or outermost concentric ring to provide a generally rectangular heating pattern. At least one row of lamps can be provided tangentially to the circular portion of the lamp array to provide preheating or postheating of process gases in the flow direction of a rectangular processing chamber.
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