Fault detection apparatuses and methods for fault detection of semiconductor processing tools
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United States of America Patent
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Jul 29, 2014
Grant Date -
May 17, 2012
app pub date -
Jan 23, 2012
filing date -
Dec 12, 2007
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Abstract
Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool includes sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
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